Ubushuhe n'ibyuka biva mu mvange: Uburyo irangi ry'ubuso rigira ingaruka ku isuku ya gaze

Muri sisitemu ya gaze isukuye cyane muri iki gihe, itandukaniro riri hagati y’uburyo bwo kunguka n’uburyo buhenze akenshi riterwa n’ibyo utabona. Ubushuhe n’uduce duto — bipimwe mu bice kuri miliyari cyangwa ndetse n’ibice kuri tiriyari — bishobora kwanduza umuyoboro wa gaze mu buryo bucece, bikangiza ireme ry’ibicuruzwa, kandi bigafunga imiyoboro ikora semiconductor. Nubwo ibikoresho byo kuyungurura, gutunganya no kugenzura amazi ari byo byitabwaho cyane, kimwe mu bintu by’ingenzi bigira ingaruka ku isuku ya gaze ni ubuso bw’umuyoboro utwara gaze. Uburyo ubwo buso burangira bugena ingano y’ubushuhe bushobora guhumeka, umubare w’uduce bushobora gufata, n’ingano y’ubushuhe bushobora kurenga mu gihe cyose sisitemu imaze gukora. Iyi mfashanyigisho isobanura uburyo bwo gusohora ubushuhe n’uduce duto, ipima ingaruka z’isuku y’ubuso ku isuku ya gaze, kandi ikagaragaza ingamba zo kurangiza no gukoresha kugira ngo hatangwe imikorere myiza cyane (UHP).

Gutesha umutwe ni iki kandi kuki ari ingenzi?

Gusohora imyuka ni ukurekura buhoro buhoro imyuka n'ubushuhe byagiye byinjira cyangwa byinjira ku buso bw'ikintu cyangwa bigashonga mu bice byacyo hafi y'ubuso. Gusohora bitangira iyo igitutu kiyikikije kigabanutse, ubushyuhe bukiyongera, cyangwa imyuka yo gusukura ikwirakwira ku buso - neza neza nk'uko bigaragara mu buryo bwo gutanga imyuka, mu byumba bisukura umwuka, no mu bikoresho byo gusesengura. Mu byuma bitagira umugese, umwuka w'amazi ni wo ukunze gukurura imyuka, hagakurikiraho hifashishijwe hydrocarbon n'ibisigazwa by'ibisigazwa by'ibisigazwa.

Nubwo ku rugero ruto rusa n'aho rudakomeye, ubushuhe bushobora gukorana n'imyuka yihariye, uduce twa nucleate, guhindura ibipimo by'isesengura, n'ibintu bishobora kwangiza uburozi nka za controllers, valves, n'ibyumba byo kubikamo. Uko imiterere y'ibikoresho igabanuka kandi igatunganya amadirishya, inganda za semiconductores zasunikiye ibisabwa mu gusukura gazi kuva ku bice kuri miliyoni (ppm) kugeza ku bice kuri miliyari (ppb) n'ibice kuri tiriyari (ppt). Kuri izi ntera, imiterere y'ubuso bw'umuyoboro ntabwo ikiri nto - ni imiterere y'ibanze igomba gutegurwa, kwemezwa, no kubungabungwa kuva ku ruganda kugeza ku gikoresho.

Uburyo bw'ingenzi

Ubuso Nyabwo Bwongerewe

Ubuso bugoye bufite ubuso bunini cyane kurusha ubworoshye, kandi ubuso bwinshi busobanura ahantu henshi aho ubushuhe bushobora gufatana. Isano ntabwo ari umurongo ugororotse: ubushuhe mu buryo bw'impinga, ibibaya, n'intambwe zigana ku mupaka w'ibinyampeke byongera ubuso bushobora gukoreshwa mu kuyungurura. Kugabanya ubushuhe bw'ubuso - bupimwe nka Ra, impuzandengo y'ubuso - kuva kuri 0.8 µm kugeza kuri 0.25 µm bishobora gukuraho igice kinini cy'ahantu ho kuyungurura, kuko imyenge miremire cyane, ifata amazi cyane, ikurwaho burundu. Niyo mpamvu ubuso bukunze kuvugwa nk'ikigega cyihishe cy'ubushuhe kigena igihe sisitemu igomba gusukurwa mbere yuko igera ku buziranenge bw'ibanze.

Kumenya no Gusohora Imyuka Irimo Ubushuhe

Ubushuhe butuma habaho isano ihamye n'ubuso bw'icyuma, cyane cyane hamwe n'ibice bya okiside bikura mu byuma bidashonga. Ku buso butagira amazi kandi bukungahaye kuri chromium, molekile z'amazi zibanza zijya kuri okiside, hanyuma zikiyongera nk'ibice bikurikiranye bya physisorbed. Iyo umuyoboro ushyizwemo umwuka cyangwa umwuka utemba, ibi bice bigenda bishira buhoro buhoro: ibice byo hanze bifunguye birekura mbere, mu gihe amazi ya chemisorbed agumaho kandi agasaba ingufu, akenshi mu buryo bw'ubushyuhe, kugira ngo asohoke. Ingaruka zifatika ni uko umuyoboro uherutse gushyirwaho cyangwa urangiye nabi usohora ubushuhe mu muyoboro wa gazi amasaha menshi cyangwa iminsi, bikongera igihe cyo gusukura no kugumana ubuziranenge buri munsi y'ibipimo byagenwe.

Gufata uduce duto tw'ibice

Uduce duto cyane, imyobo, n'utundi duce duto ku buso bugoye bikorera nk'ibigega by'uduce duto. Mu gihe cy'imikorere isanzwe, utwo duce dushobora kuguma mu mutego, ariko ubwihindurize bw'ubushyuhe, kunyeganyega, cyangwa impinduka zitunguranye mu cyerekezo cy'amazi n'umuvuduko bishobora kubikuramo, bigatera umwanda mu muyoboro wa gazi. Mu nganda zikora ibikoresho bya semiconductor, agace kamwe gashobora guteza ikibazo gikomeye ku gasanduku k'amazi, kandi uduce duto dufata amaguru yapfuye cyangwa mu mwobo wa valve biragoye cyane kubikuraho iyo sisitemu imaze gukoreshwa. Uduce tworoshye kandi tudafite imvune ntitugabanya gusa umubare w'uduce twakozwe, ahubwo tunatuma ubuso busigaye bworoshye cyane gusukura no kugenzura.

Ingaruka ku isukurwa rya gaze

Guhitamo irangi ry'ubuso bifite ingaruka zitaziguye kandi zishobora gupimwa ku isuku ya gazi, igihe cyo gusukura, no kudatezuka igihe kirekire. Ubuso bubi buri mu gipimo cya Ra 0.5–0.8 µm — busanzwe mu muyoboro ukonje utaratunganywa — bugumana ubushuhe n'uduce twinshi. Burarenga gazi cyane, busaba igihe kirekire cyo gusukura, kandi muri rusange bukwiriye gusa gukoreshwa ku rwego rwa ppm aho ubwandu bwemerwa rimwe na rimwe. Ubuso butoshye buri mu gipimo cya Ra ≤ 0.25 µm, bukunze gukorwa na electropolishing (EP), bukora mu buryo butandukanye cyane: ntibutanga ahantu hanini ho gukurura, hato hasohoka gazi, kandi hato hakora uduce duto cyane. Ingaruka zapimwe mu bushakashatsi bwasohotse; ubushakashatsi bumwe kuri titaniyumu bwagaragaje ko kugabanuka kwa 35% mu gukaraba kw'ubuso byatumye amazi asohoka gazi agabanukaho 30%, kandi imiterere isa nayo iragaragazwa ku byuma bitagira icyuma. Ku bijyanye na sisitemu zo gusukura gazi nyinshi zo mu rwego rwa ppb na ppt, ubuso bukozwe na electropolishing si ikintu cy'agaciro — ni ikintu gisabwa.

Uburyo Irangi ry'Ubuso Rigira Ingaruka ku Mikorere ya Sisitemu

Irangi ry'ubuso rigira ingaruka nyinshi kuruta gusohora imyuka. Rigira ingaruka ku gihe cyo gusukura (ubuso bworoshye bugera ku bushuhe bw'ibanze vuba), gushonga kw'uduce duto mu gihe cy'amazi, kudashonga (ubuso bwa EP bufite chromium nyinshi burwanya kwangirika), no gusukurwa (ubuso bworoshye busohora ibikoresho byo gusukura no koza amazi burundu). Rigira ingaruka kandi ku gusukurwa: irangi ry'ubuso risukuye kandi rigenzurwa ritanga ubuziranenge buhamye bwo gusukurwa mu buryo buhoraho, bigabanya ibyago byo gukururwa n'imyanda no guhinduka kw'ibara ry'ubushyuhe bishobora kuba inkomoko y'ubwandu mu gihe kizaza.

Ingamba zo kugabanya ingaruka

Kugira ngo umuntu agere ku isuku iri hejuru y’imyuka bisaba uburyo butandukanye bwo guhuza, buri buryo bukemura inzira itandukanye yo kwanduzanya.

Ubuvuzi bw'ubuso

Electropolishing (EP) ni yo ngamba ikoreshwa cyane muri sisitemu za UHP. Iyi nzira ikuraho urwego rw'icyuma ruciriritse, rugenzurwa hejuru, igabanya uduce duto tw'imisatsi, ifungura kandi igakuraho imyenge, kandi yongera chromium muri filime idakora - bituma ubuso budashobora kwangirika no kutagumana ubushuhe. Mu gihe ugena igikoresho cya gaze cya UHP, hitamoumuyoboro udafite umugozi ukozwe mu buryo bw'amashanyaraziku bice byatose n'ibikoresho bihuye ku iherezo rimwe; kuvanga irangiza ry'ibikoresho muri sisitemu imwe bigabanya isuku y'itsinda ryose. Ku bijyanye no gukoresha aside pickling na passivation (AP) na bright annealing (BA) bitanga uburinganire bwiza bw'isuku n'igiciro.

Gusukura no Gufata neza

Gutunganya ubuso gusa ntibihagije — gusukura neza bikuraho ibisigazwa by’inganda, amavuta, n’ubushuhe byasigaye mu ntambwe za mbere zo gutunganya. Amabwiriza asanzwe ahuza gukuraho amavuta ya alkaline, gusukura hakoreshejwe ikoranabuhanga, no koza amazi yakuwemo ayoni, hagakurikiraho kumisha ahantu hasukuye no gupfunyika mu buryo bufunze kandi burinzwe mu mashashi abiri. Gufata neza ibintu ni ingenzi cyane: uturindantoki, ibikoresho bisukuye, n’ububiko bupfundikiye birinda ko ibintu byangirika hagati y’uruganda n’aho rushyirwa.

Guteka hanze

Gushyushya ibikoresho munsi y’umwuka uvamo umwuka cyangwa umwuka utemba wihuta winjira mu mazi, bikuraho ubushuhe bwashoboraga gusohoka mu buryo bw’umwuka mu gihe cy’ikorwa. Gushyushya ni ingenzi cyane ku mavali, ibikoresho, n’aho amazi asukwa, aho imiterere y’ikirere n’ahantu haterwa n’ubushyuhe birema ahantu hihishe ho guhumeka. Bihujwe no gushyushya bidafite ishingiro, gushyushya bishobora kugabanya igihe sisitemu nshya ikenera kugira ngo igere ku isuku y’ibanze kuva ku minsi kugeza ku masaha.

Gukuraho

Gutemba umwuka udafite umwuka, akenshi azote cyangwa argon, binyura muri sisitemu bitwara imyanda yavuye mu mwuka kandi bikarinda ubushuhe kongera guhumeka. Gutemba ni intambwe yo gutangira kandi ni igikorwa gihoraho: sisitemu zakozwe neza zikomeza gusukura amazi make mu bice biri mu mwanya wabyo kandi zigakoresha umwuka wo gusukura amazi ufite isuku nyinshi kugira ngo isukure ubwayo idahinduka isoko y’umwanda.

Guhitamo Ibikoresho

Gukoresha ibikoresho bigabanya imyuka ihumanya ikirere bigabanya ubwandu bw'imbere mbere yuko bibaho. Kuri serivisi ya UHP, icyuma kitagira umwanda cya 316L gikorwa na VIM-VAR (vacuum induction melting ikurikirwa na vacuum arc remelting) ni cyo gipimo ngenderwaho mu nganda: gushonga kabiri gakuraho imyuka bigabanya imvange zitari ibyuma kandi bigatanga imiterere mito kandi ihuye byoroshye kurangiza neza kandi idakunze kugaragara. Ibikoresho byo mu rwego rwo hasi bifite imvange bishobora gutsinda ndetse n'imvange nziza yo hejuru, kuko imvange zikora nk'ahantu ho gutangiza imyobo no gukora uduce duto.

Guhitamo Irangi Rikwiye ryo Gukoresha

Inganda n'imikorere itandukanye bifite ibisabwa bitandukanye mu isuku, kandi kurangiza neza bihuza isuku n'ikiguzi n'uburyo iboneka. Ku bijyanye n'ikoreshwa aho isuku yo ku rwego rwa ppb ihagije - urugero, imirongo y'imikorere ifite isuku nyinshi n'ibigo bikora imiti -umuyoboro udafite umugozi ugaragara (BA)itanga uburinganire bwiza bw'ubwiza bw'ubuso, kugenzura ingano, n'igiciro. Kugira ngo serivisi isaba imbaraga nyinshi, ibikoresho bikozwe mu buryo bw'amashanyarazi bigenwa nta kubangamira.

• Gukora ibikoresho bya semiconductor na flat-panels: EP finish, Ra ≤ 0.25 µm, 316L VIM-VAR, ifite amasakoshi abiri kandi ifite icyemezo cy’ingufu. Ingengo y’imari ya outgassing na particles igenwa muri ppb-ppt kandi ikubahirizwa hakurikijwe imiterere y’ubuso n’iy’uduce.
• Imyuka yihariye n'iy'ikoranabuhanga: Imiyoboro ya EP cyangwa BA yo mu rwego rwo hejuru ifite irangi ry'imbere rigenzurwa; utubati twa gazi n'udupapuro two gukwirakwiza ibikoresho bisaba ubuziranenge buhoraho kuri buri gice.
• Imiti n'ikoranabuhanga rya bio: Ubuso bwa EP cyangwa BA bworoshye gusukura no kwemeza, bwujuje amabwiriza ya ASME BPE yo kurangiza ubuso kandi bushyigikira imikorere ya CIP / SIP.
• Ibikoresho byo gusesengura no gupima gaze:umuyoboro w'ibikoreshohamwe n'umurambararo w'imbere ugenzurwa n'uburyo bwo kwihanganira ibintu neza, kuko uburyo ibimenyetso bihamye bushingiye ku mwuka utwara ibintu udashobora gusubiramo kandi udafite umwanda.
• Imiyoboro rusange n'imiyoboro y'inganda: Irangi rya AP cyangwa BA ritanga isuku ihagije kuri serivisi yo ku rwego rwa ppm ku giciro gito.

Amahame n'Ibisobanuro by'Inganda

Kugaragaza neza irangi ry'ubuso bisaba ururimi rusanzwe. Ra (ubugari bw'ikigereranyo cy'uburinganire) ni cyo gipimo gikoreshwa cyane, ariko porogaramu z'ingenzi nazo zigaragaza Rz, Rmax, n'umubare w'ibipimo by'ubugari bw'ubuso nka SEMI F19. Ku bijyanye n'imiyoboro y'icyuma kitagira umugozi, inyandiko zisanzwe zirimo ASTM A269 na A270 ku miyoboro idafite umugozi kandi isuku, ASME BPE ku bikoresho bitunganya ibinyabutabire, n'amahame ya SEMI ku bikoresho bya semiconductor. Iyo ibisobanuro bisaba ireme rya EP, bigomba kugaragaza agaciro ka Ra, uburyo bwo gupima, n'ibipimo byo kwemerwa - urugero, "Ra ≤ 0.25 µm, ipimwa hakoreshejwe stylus profilometry ku buso bw'imbere, yagenzuwe kandi yemejwe 100%."

Ibibazo Bikunze Kubazwa

Q: Ni iyihe gaciro ka Ra gafatwa nk'urwego rwa UHP?

A: Sisitemu zo mu rwego rwo hejuru cyane zigaragaza Ra ≤ 0.25 µm, kandi ibikoresho byinshi bya semiconductor fabs bisaba Ra ≤ 0.13 µm ku buso bukozwe n'amashanyarazi. Igisabwa nyacyo giterwa n'uburyo ibintu bikorwamo n'ubwoko bw'ubuziranenge butangwa.

Q: Ese electropolishing ikuraho uduce duto?

A: Electropolishing ikuraho urwego rw'icyuma rugenzurwa, rukuraho uduce duto, imikufi, n'imyenge aho uduce n'ubushuhe byihisha. Ntibisimbuza isuku: igice gikozwe neza gikoreshwa n'amashanyarazi kigomba gusukurwa, kozwa, no gupfunyikwa mu cyumba gisukuye.

Q: Ni gute kurangiza ubuso bigira ingaruka ku gihe cyo gusukura?

A: Ubuso butoshye bufata ubushuhe bwinshi kandi bukaburekura buhoro buhoro, bityo kugera ku isuku y'ibanze bifata igihe kirekire. Ubuso butoshye bukoresheje amashanyarazi bushobora kugabanya igihe cyo gusukura amasaha cyangwa iminsi, ibyo bikaba bivuze ko butuma amasosiyete mashya yihuta kandi igihe cyo kudakora kigabanuka.

Q: Ese umuyoboro w'amazi ushyushye (BA) uhagije ku buryo bwo gukoresha gazi?

A: Umuyoboro wa BA ufite Ra hafi 0.25–0.4 µm ukwiriye gukoreshwa mu buryo bwinshi bwo gusukura cyane no mu buvuzi. Kuri serivisi ya ppb–ppt semiconductor na gaze yihariye, muri rusange hakenewe electropolishing.

Q: Ni ikihe gikoresho cyiza kuri sisitemu za gaze zifite isuku nyinshi?

A: Icyuma kitagira umugese cya 316L cyakozwe na VIM-VAR melting ni cyo gikoreshwa cyane muri sisitemu za gaze za UHP kubera ko gifite ingano ntoya kandi gisukuye neza.

Umwanzuro

Irangi ryo hejuru si ikintu cy’ubwiza mu miyoboro y’icyuma kidashonga — ni imiterere y’imikorere igenga uburyo amazi ahuzwa, uburyo uduce duto two kubika, no gusohoka kw’imyuka mu gihe cyose cy’ubuzima bwa sisitemu ya gazi. Irangi ryo hejuru ni ngombwa kugira ngo hagerwe ku rwego rwo hejuru rw’isuku ya gazi. Mu kugaragaza irangi rikwiye — ryakoreshejwe amashanyarazi kugira ngo rikoreshwe muri serivisi ya UHP, rikozwe mu buryo bw’umukara cyangwa rigashyirwa mu kato kandi rigashyirwa mu mwanya waryo kugira ngo rikoreshwe mu buryo budasaba imbaraga nyinshi — rigahuzwa n’ibikoresho bigabanya imyuka nk’icyuma kidashonga cya VIM-VAR cya 316L, kandi rigashyigikirwa n’uburyo bwo gusukura, guteka no gusukura, injeniyeri zishobora kubaka uburyo bwo gutanga gazi buhuye n’intego zikomeye zo gusukura kandi zikabugumana mu buzima bwose bw’uruganda.