1. Ibisobanuro byinshi bya sisitemu ya gazi Ibisobanuro:
Kubika no kugenzura imyuka ya inert Ubwoko bwa gaze: Imyuka ya inert isanzwe (azote, argon, umwuka ucanye, nibindi)
Ingano y'umuyoboro: Kuva 1/4 (kugenzura umuyoboro) kugeza kumuyoboro wa santimetero 12
Ibicuruzwa byingenzi bya sisitemu ni: diaphragm valve / inzogera ya valve / umupira wumupira, umuhuza-mwinshi (VCR, ifishi yo gusudira), umuhuza wa ferrule, umuvuduko ugenga valve, igipimo cyumuvuduko, nibindi.
Kugeza ubu, sisitemu nshya irimo kandi sisitemu nini ya gaze idasanzwe, ikoresha silinderi ya gaze ihamye cyangwa amakamyo ya tank yo kubika no gutwara.
2. Ibisobanuro bya sisitemu yo kweza:
Kurandura umwanda muri gaze nyinshi kumiyoboro ya gazi isukuye cyane
3. Ibisobanuro by'akabati gasi Ibisobanuro:
Tanga igenzura ryumuvuduko nogukurikirana amasoko yihariye ya gaze (uburozi, yaka, reaction, gaze yangirika), kandi ufite ubushobozi bwo gusimbuza silinderi.
Aho uherereye: Iherereye kuri Sub-fab cyangwa hasi yo kubika imyuka idasanzwe Inkomoko: NF3, SF6, WF6, nibindi.
Ingano y'umuyoboro: Umuyoboro wa gazi w'imbere, muri rusange 1/4 santimetero yo gutunganya, 1 / 4-3 / 8 santimetero cyane cyane kumuyoboro wa azote usukuye.
Ibicuruzwa byingenzi: Ibyiza bya diaphragm bifite isuku, kugenzura indangagaciro, igipimo cyumuvuduko, igipimo cyumuvuduko, umuhuza mwinshi (VCR, ifishi yo gusudira) Aka kabati gazi ahanini irimo ubushobozi bwo guhinduranya byikora kuri silinderi kugirango itange gazi ikomeza kandi isimburwe neza.
4. Ibisobanuro byo gukwirakwiza:
Guhuza isoko ya gazi na coil yo gukusanya gaze
Ingano yumurongo: Mu ruganda rwa chip, ingano yumuyoboro mwinshi wo gukwirakwiza gazi muri rusange uri hagati ya 1/2 na santimetero 2.
Ifishi yo guhuza: Imiyoboro idasanzwe ya gazi isanzwe ihujwe no gusudira, nta guhuza imashini cyangwa ibindi bice byimuka, cyane cyane ko guhuza gusudira bifite kwizerwa gukomeye.
Mu ruganda rwa chip, hari kilometero amagana za tubing zifitanye isano no kohereza gaze, ahanini zifite uburebure bwa metero 20 kandi zisudira hamwe. Bimwe mubituba byunamye hamwe nigituba cyo gusudira nabyo birasanzwe cyane.
5. Imikorere myinshi ya valve agasanduku (Agasanduku ka Manifold, VMB) Ibisobanuro:
Nugukwirakwiza imyuka idasanzwe kuva isoko ya gaze kubikoresho bitandukanye birangira.
Ingano yimbere imbere: 1/4 cyumuyoboro utunganijwe, na 1/4 - 3/8 umuyoboro wo gutunganya. Sisitemu irashobora gukoresha igenzura rya mudasobwa kugirango isabe ububiko bukoreshwa cyangwa ibiciro biri hasi hamwe nintoki.
Ibicuruzwa bya sisitemu: diaphragm isukuye cyane / indabyo, kugenzura indangagaciro, guhuza isuku nyinshi (VCR, ifishi yo gusudira mikorobe), igitutu kigenga imiyoboro, igipimo cyumuvuduko nigipimo cyumuvuduko, nibindi. Gukwirakwiza imyuka ya inert, Panel Manifold Panel - VMP.
6. Icyiciro cya kabiri cya plaque / agasanduku (Igikoresho cya Hookup Panel) Ibisobanuro:
Huza gaze isabwa nibikoresho bya semiconductor kuva isoko ya gaze kugeza ibikoresho birangire hanyuma utange amabwiriza ajyanye nigitutu. Aka kanama ni sisitemu yo kugenzura gaze yegereye ibikoresho birangira kuruta VMB (agasanduku k'imikorere myinshi).
Ingano ya gazi: 1/4 - 3/8
Ingano y'amazi: 1/2 - 1 cm
Gusohora imiyoboro ingana: 1/2 - 1 cm
Ibicuruzwa byingenzi: diaphragm valve / inzogera ya valve, valve imwe-imwe, umuvuduko ugenga valve, igipimo cyumuvuduko, igipimo cyumuvuduko, isuku ryinshi (VCR, micro-welding), ferrule ifatanije, umupira wumupira, hose, nibindi.
Igihe cyo kohereza: Ugushyingo-22-2024